English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Optical DUV-lithography for high microstructures 2
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1996
Journal Article
Title
Optical DUV-lithography for high microstructures 2
Author(s)
Heuberger, A.
Löchel, B.
Journal
Microsystem Technologies
DOI
10.1007/s005420050045
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
