Micromirrors for direct writing systems and scanners

Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts like Viscoelastic Control Layer (VCL), Cantilever Beam Mirror (CBM), and Moving Liquid Mirror (MLM) have been developed. All of them allow to create deformation profiles which act as phase grating whose period is defined by the pitch of the pixel electrodes. For the angular deflection of light a new type of resonant microscanner mirror was developed. The device is based on a silicon micromechanical torsional actuator. The new approach for the configuration of the electrodes and the resulting driving principle allows to achieve large scanning angles (ñ 30 degree optically at atmospheric pressure) at low driving voltages (20 V max.) and low power consumption (less than 1 µW). The operation principle of the new device enables the realization of 2D scanners as well.