Realization of a hybrid-integrated MEMS scanning grating spectrometer

Spectrometers and Spectrographs based on scanning grating monochromators are well-established tools for various applications. As new applications came into focus in the last few years, there is a demand for more sophisticated and miniaturized systems. The next generation spectroscopic devices should exhibit very small dimensions and low power consumption, respectively. We have developed a spectroscopic system with a volume of only (15 × 10 × 14) mm3 and a few milliwatts of power consumption that has the potential to fulfill the demands of the upcoming applications. Our approach is based on two dierent strategies. First, we apply resonantly driven MEMS (micro electro mechanical systems). The latest generation of our MEMS scanning grating device has two integrated optical slits and piezoresistive position detection in addition to the already existing miniaturized 1-d scanning grating plate and the electrostatic driving mechanism. Our second strategy is to take advantage of the hybrid integration of optical components by highly sophisticated manufacturing technologies. One objective is the combination of MEMS technology and a planar mounting approach, which potentially facilitate the mass production of spectroscopic systems and a signicant reduction of cost per unit. We present the optical system design as well as the realization of a miniaturized scanning grating spectrometer for the near infrared (NIR) range between 950 nm and 1900 nm with a spectral resolution of 10 nm. The MEMS devices as well as the optical components have been manufactured and rst samples of the spectroscopic measurement device have been mounted by an automated die bonder.