English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Mechanical characterization of poly-silicon membranes by efficient experimental tests and numerical simulations
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2015
Conference Paper
Title
Mechanical characterization of poly-silicon membranes by efficient experimental tests and numerical simulations
Author(s)
Brückner, J.
Auerswald, E.
Vogel, D.
Dudek, Rainer
Rzepka, Sven
Dehe, A.
Mainwork
Smart Systems Integration 2015
Conference
Smart Systems Integration Conference (SSI) 2015
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2015
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS