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Mechanical characterization of poly-silicon membranes by efficient experimental tests and numerical simulations
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2015
Conference Paper
Title
Mechanical characterization of poly-silicon membranes by efficient experimental tests and numerical simulations
Author(s)
Brückner, J.
Auerswald, E.
Vogel, D.
Dudek, Rainer
Rzepka, Sven
Dehe, A.
Mainwork
Smart Systems Integration 2015
Conference
Smart Systems Integration Conference (SSI) 2015
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2015
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
