2010
Presentation
Title

Clean technology for the ultra barrier layer production

Title Supplement
Presentation held at Flat Panel Display Materials and Manufacturing Equipment; 36th Working Group Meeting of the German Flat Panel Display Forum (DFF), December 8/9, 2010, Stuttgart
Abstract
Thin film based industries (OLED; Organic photovoltaic, CIS-thin film photovoltaic) require very dense layers. Fraunhofer IPA investigations showed that besides process parameters also contamination have an impact on the barrier of a layers. The main contamination risks are particles on substrates regarding layer penetration. Airborne molecular contamination (AMC) caused e.g. by out-gassing of materials can have a strong impact as well.
Author(s)
Bürger, Frank  
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)