SoC compatible 1T1C FeRAM memory array based on ferroelectric Hf0.5Zr0.5O2

This paper experimentally demonstrates fundamental memory array operation of a ferroelectric HfO 2 -based 1T1C FeRAM. Metal/ferroelectric/metal (MFM) capacitors consisting of a TiN/ Hf 0.5 Zr 0.5 O 2 (HZO)/TiN stack were optimized for a sub 500°C process. Structures revealed excellent performance such as remanent polarization, 2P T > 40 mC/cm 2 endurance > 10 11 cycles, and 10 years data retention at 85°C. Furthermore, the MFM capacitors were successfully integrated into a 64 kbit 1T1C FeRAM array including our dedicated circuit for array operation. Back-end-of-line (BEOL) wiring showed no degradation of the underlying CMOS logic. Program and read operation were properly controlled resulting in 100 % bit functionality at an operation voltage of 2.5 V and operating speed at 14 ns. This technology matches requirements of last level cash (LLC) and embedded non-volatile-memory (NVM) in low power System-on-a-Chip (SoC) for IoT applications.