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  4. acp Partline Integrated data processing of particle measurements
 
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1998
Journal Article
Titel

acp Partline Integrated data processing of particle measurements

Abstract
Particle contamination has a decisive influence on production success and is therefore an important focal point in the monitoring of "clean" productions. In order to control contamination, data has to be recorded, evaluated in a defined way and be further processed. Modern measurement software can be extremely useful, provided that it integrates the individual process steps and gives the user a flexible evaluation of his raw data adapted to his requirements.The Fraunhofer Institute for Manufacturing Engineering and Automation in Stuttgart has developed an integrated software package which offers a holistic solution, even to complex contamination tests.
Author(s)
Naffin, F.
Ernst, C.
Fode, P.
Zeitschrift
Semiconductor FABTECH
DOI
10.24406/publica-fhg-192033
File(s)
001.pdf (496.69 KB)
Language
English
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Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA
Tags
  • cleanroom

  • contamination

  • data aquisition

  • data processing

  • evaluation

  • measurement

  • monitoring

  • particle

  • process control

  • quality control

  • software

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