Light Scattering of optical Components and their Imperfections: Measurement, Modelling, and System Analysis

Light scattering in optical systems is caused by various imperfections such as surface roughness, bulk inhomogeneity, contamination, and ghost light beam paths. Control of these scattering sources is crucial, particularly for high-precision optical components, and involves both measurement and modelling from the design phase through fabrication to system integration. Recent developments at Fraunhofer IOF have led to advanced instruments for characterization of both optical components and system. Moreover Light scattering measurements provide not only analysis capabilities but also critical data for optimizing fabrication processes by identifying scattering contributors. Results and applications of these techniques and tools will be presented, highlighting their impact on optimizing optical system fabrication.