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  4. A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror
 
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2009
Conference Paper
Title

A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Abstract
Testing and characterization of Micro-Electro-Mechanical Systems (MEMS) and Micro-Opto-Electro-Mechanical Systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test MEMS and MOEMS especially to examine motions, deflections and resonance frequencies. This paper presents a fast-developing and low-cost environment for MEMS and MOEMS testing and characterization. The environment is based on a flexible mixed-signal platform, named ISIF (Intelligent Sensor InterFace). As a case study we consider the characterization of a double axis scanning micromirror. The testing environment has been validated by comparing measurement results with results obtained by Finite Element Method simulation performed with Comsol MultiphysicsTM. Finally, these results have been used to create an electrical equivalent model of the micromirror.
Author(s)
Battini, F.
Volpi, E.
Marchetti, E.
Cecchini, T.
Sechi, F.
Fanucci, L.
Hofmann, U.
Mainwork
3rd International Workshop on Advances in Sensors and Interfaces, IWASI 2009  
Conference
International Workshop on Advances in Sensors and Interfaces (IWASI) 2009  
DOI
10.1109/IWASI.2009.5184777
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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