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Reliability concepts of microsystem integration
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2009
Conference Paper
Titel
Reliability concepts of microsystem integration
Author(s)
Wunderle, B.
Michel, B.
Hauptwerk
Smart systems integration 2009. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2009
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
