Verfahren zum beruehrungslosen Messen von Spannungen innerhalb von integrierten Schaltungen

In order to measure the conductor voltage within an integrated circuit, said circuit is covered with a layer of liquid crystal onto which a glass plate provided with a light-transmitting counter-electrode is lowered. A pulsed voltage is applied to the counter-electrode, said pulsed voltage being in a fixable temporal relationship with the conductor voltage within the integrated circuit. High-frequency conductor voltages at frequencies above the limit frequencies of the orientation of the molecules of the liquid crystal are optically detectable.