Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe

The description refers to an electrostatically operated microdiaphragm pump having a first pump body acting as the counterelectrode body and a second pump body having a diaphragm region. The two pump bodies form a cavitiy bordering on the diaphragm region and are electrically isolated from each other. The cavity is filled with a medium which is different from the fluid to be pumped. The pump bodies can be made of a semiconductor material of different charge types. Preferably, the medium situated in the cavity has a high dielectric constant