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Patent
Title

Passivierte Endoberflaechen

Other Title
Process to manufacture a microelectronic component in a gas plasma by cleaning and application coating with a passive surface agent.
Abstract
Die Erfindung betrifft ein Verfahren zur Passivierung einer fuer die Verloetung vorgesehenen Endoberflaeche im Plasma sowie eine verbesserte passivierte Endoberflaeche, die durch dieses Verfahren erhaeltlich ist.

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EP 1544320 A UPAB: 20050823 NOVELTY - In a process to manufacture a microelectronic component, a surface is rendered passive and suitable for a soldering process. In the presence of a gas plasma, the surface is de-oxidised cleaned and covered by a passive coating agent in a single process. The passive coating is removable by a soldering process. Also claimed is a suitable microelectronic component. USE - Process to manufacture a microelectronic component. ADVANTAGE - The process replaces a multi-stage process with a single-stage process.
Inventor(s)
Hegemann, D.  
Oehr, C.  
Mueller, Michael  
Link to:
Espacenet
Patent Number
2003-10359371
Publication Date
2005
Language
German
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB  
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