Anordnung zur Messung des Abstandes eines Objektes von der Anordnung mit einem integriert-optischen Sensor

The invention relates to an arrangement for the measurement of the distance of an object (30) by means of an integrated optical sensor, at least consisting of a susbtrate body (2) and three monomode optical waveguides (6, 7, 8) forming two Michelson interferometers extending from a front end face (4) of the substrate body (2) along its surface (3) to the rear end face (5). The middle waveguide (6), in whose front end face (4) light from a laser beam source (31) is injected, splits in the front area of the substrate body (2) into two branches (6', 6'') which, together with the adjacent outer waveguide (7, 8), form a coupler (11, 12) and, in the rear area of the substrate body (2), guides a common measurement beam which can be injected or extracted to or from the rear end faces (5) of the two interferometers. Each of the two outer waveguides (7, 8) serves to guide a reference beam reflected by a mirror (25, 26) in the rear area of the substrate body (2) and to guide the interference sign als, which can be extracted from the front end face (4), said interference signals being fed to a detector (36, 37) coupled to an electronic evaluation circuit (38). The device for phase modulation is allocated to the middle and to one of the outer waveguides (6 or 8) in the rear area. A main feature of the invention is that the middle waveguide (6) is connected between the front face end (4) and the coupling area (11, 12) by a ...