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Patent
Title
Vorrichtung und Verfahren zur winkelaufgelösten Streulichmessung
Other Title
Device for measuring angle-dissolved scattered light of sample e.g. lens, determines values for power spectral density to analyze scattered components and parameters for connection of fractal spectral power density
Abstract
The device has an illumination device to illuminate a sample (1) with light under an incident angle. A detector assembly detects two portions of light strewn having different light frequencies at sample. An evaluation unit evaluates output signals of detector assembly. The values for a power spectral density (PSD) are determined to analyze the scattered components and parameters for the connection of fractal spectral power density. An independent claim is included for an angle-dissolved scattered light measurement method.
Inventor(s)
Link to:
Patent Number
102012005417
Publication Date
2012
Language
German