Vorrichtung zur in-situ Messung von mechanischen Spannungen in Schichten

The system, for measuring the deformation of the substrate under test, has an inner housing supplied with a cooling medium through supply lines. The essential components of the optical distance measuring unit are arranged in the inner housing. The inner housing has electrically conducting material and lies at earth potential. A temp. sensor is provided in the inner housing. A regulating circuit regulates the cooling medium in such a manner that a specified temp. is held in the inner housing. USE/ADVANTAGE - PVD or CVD. For industrial plants e.g. vacuum coating systems. Facilitates measurement and control of strains during emergence of layers.