• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Patente
  4. Verfahren und Vorrichtung zur Erweiterung des Messbereichs bei Nomarski-Mikroskopen
 
  • Details
Options
Patent
Title

Verfahren und Vorrichtung zur Erweiterung des Messbereichs bei Nomarski-Mikroskopen

Other Title
Setup and process for expanding measuring range using Nomarski microscopes
Abstract
The invention relates to a setup and a process for expanding the measuring range using Nomarski microscopes, whereby polarized illuminating light is split into two wave fronts by at least one element producing a shear amount (Nomarski prism 4), then the wave fronts are guided by a projecting optical element in such a way that illuminating light impinges on the specimen (7), is reflected from there, transverses the projecting optical element and the element producing the shear amount, whereby the two reflected wave fronts are superimposed and are brought into interference by an analyzer (2). The invention is characterized by the fact that, by rotating the specimen (7) in an xy plane about a y axis by an angle of <delta><psi> and by performing a measurement in each of the different angle positions <psi><-1 and <psi>-2, light (intensities I<-1, I<-2) is recorded by a receiver (matrix receiver 1) and the inclination angles <psi> (x, y) of the surface elements are determined from the signal s by means of the expanded inclination angle range (e.g., n<---4, ..., n<0, ..., n<+4). With the use of the invention, inclination angles <psi> can be determined unambiguously by surface elements at great intervals, and this corresponds to an expansion of the measuring range of the Nomarski microscope by, for example, a factor of 5.
Inventor(s)
Schulz, U.
Gerold, F.
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=4311726A
Patent Number
1993-4311726
Publication Date
1996
Language
German
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024