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Title

Verfahren zur Ablation einer Schicht

Date Issued
2014
Author(s)
Brand, Andreas
Nekarda, Jan
Patent No
102012214335
Abstract
The invention relates to a method for ablating at least one layer (13) from a substrate (10), wherein laser radiation (210) from at least one first laser (21) acts on at least a sub-area (105) of the surface of the layer (13), wherein the first laser (21) produces pulsed laser radiation (210) having a pulse duration less than approximately 50 ns and at least one second light source (22) is used, which produces pulsed laser radiation (220) having a pulse duration greater than approximately 1 ns or contains a continuous-wave laser or emits incoherent radiation, wherein the light (210) of the first laser (21) hits at a time at which at least the sub-area (105) of the surface is in thermal equilibrium with the surroundings.
Language
de
Institute
Fraunhofer-Institut für Solare Energiesysteme ISE
Link
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=102012214335A1
Patenprio
DE 102012214335 A1: 20120810
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