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Patent
Title
Vorrichtung zum Messen von Spannungen in integrierten Schaltungen
Other Title
Device for the measurement of voltages in integrated circuits
Abstract
A device permits the non-destructive measurement of absolute voltages, particularly on conductors in CMOS circuits. It comprises a laser device, an electro- optical active crystal and an interference set-up for generating an interference between the laser beam and one of the beams reflected by the integrated circuit, such interference serving as a guide for the voltage to be measured.
Inventor(s)
Fritz, Joachim
Lackmann, Rainer
Patent Number
1989-3920495
Publication Date
1990
Language
German