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Patent
Title

Druckmessanordnung

Other Title
Pressure measurement arrangement
Abstract
A pressure measuring arrangement has a pressure sensor structure comprising a pressure-dependent measuring capacitance, a pressure-independent reference capacitance and an evaluation circuit which derives the pressure from the capacitance measurement. To improve the linearity error, the pressure sensor structure includes a further pressure-dependent capacitance, whereby the evaluation circuit exhibits the following transfer function: Formula I, where C<-s is the measuring capacitance, C<-r the reference capacitance and C<-f the further capacitance.
Inventor(s)
Benzel, H.
Schöneberg, Uwe
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=4107345A
Patent Number
1991-4107345
Publication Date
1995
Language
German
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
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