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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
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PublicationSpecial issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009( 2010)
;Achenbach, S. ;Klymyshyn, D.Michel, B. -
PublicationMST special issue on the conference MicroNanoReliability 2007. Editorial( 2009)Michel, B.
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