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Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009
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2010
Editorial
Title
Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009
Title Supplement
Editorial
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Author(s)
Achenbach, S.
Klymyshyn, D.
Michel, B.
Journal
Microsystem Technologies
DOI
10.1007/s00542-010-1103-z
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Full text
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM