Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB

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  • Publication
    Confocal fluorescence microscopy with high-NA diffractive lens arrays
    ( 2022)
    Li, Zheng
    ;
    Taphanel, Miro
    ;
    Längle, Thomas
    ;
    Beyerer, Jürgen
    Traditionally, there is a trade-off between the numerical aperture and field of view for a microscope objective. Diffractive lens arrays (DLAs) with overlapping apertures are used to overcome such a problem. A spot array with an NA up to 0.83 and a pitch of 75 m is produced by the proposed DLA at a wavelength of 488 nm. By measurement of the fluorescence beads, the DLA-based confocal setup shows the capability of high-resolution measurement over an area of 3mm 3mm with a 2.5 0.07 NA objective. Further, the proposed fluorescence microscope is insensitive to optical aberrations, which has been demonstrated by imaging with a simple doublet lens.
  • Publication
    Analytical determination of the complex refractive index and the incident angle of an optically isotropic substrate by ellipsometric parameters and reflectance
    ( 2021)
    Chen, Chia-Wei
    ;
    Hartrumpf, Matthias
    ;
    Längle, Thomas
    ;
    Beyerer, Jürgen
    An analytical solution for the determination of both angle of incidence (AOI) and the complex refractive index from combined ellipsometric and reflectometric measurements at optically isotropic substrates is presented. Conventional ellipsometers usually measure flat surfaces because the curvatures of the surface alter the reflected or transmitted light, which causes experimental errors due to the deviation of the incident angle. However, in real industrial applications, the shapes of samples are usually curved or even free-form. In this case, the knowledge of the AOI is essential. The proposed method provides a simple way to measure the AOI and the complex refractive index of nonplanar samples without extra or complicated hardware.
  • Publication
    High-resolution confocal microscopy with low-NA objectives based on diffractive lens arrays
    ( 2021)
    Li, Zheng
    ;
    Taphanel, Miro
    ;
    Längle, Thomas
    ;
    Beyerer, Jürgen
    High resolution and large fields of view are difficult to achieve simultaneously by microscope objectives. In this work, we develop a reflection confocal microscope based on diffractive lens arrays to solve the problem. We demonstrate a prototype that generates a spot array with a numerical aperture of 0.78. Laterally, experiments show a spatial cutoff frequency of 1024 lp/mm by a 0.15 NA objective, and 912 lp/mm by a 0.07 NA objective with a 785 nm diode laser. Axially, an average height of 961 nm with a standard deviation of 49 nm is measured with a 925.5 nm calibrated step height target.
  • Publication
    Area scanning method for 3D surface profilometry based on an adaptive confocal microscope
    ( 2020)
    Luo, Ding
    ;
    Taphanel, Miro
    ;
    Claus, Daniel
    ;
    Boettcher, Tobias
    ;
    Osten, Wolfgang
    ;
    Längle, Thomas
    ;
    Beyerer, Jürgen
    Conventional confocal 3D microscopes suffer from a slow measurement speed due to its requirement of scanning in three directions. Although lateral slit scanning has been proven to perform similarly to single point scanning, a direct area confocal scanning microscope is commonly considered impossible as the system is reduced into a wide-field microscope and loses its depth discerning capability. In this article, a direct area scanning method is proposed for 3D surface profilometry based on a tilted focal field. To demonstrate the underlying principle, theoretical analysis is conducted with simulation result, showing that depth discerning capability can be maintained in area scanning when the tilting angle is specifically chosen according to the numerical aperture of the system. An adaptive experimental setup is constructed based on a programmable light source and a programmable array microscope with chromatic axial encoding. Measurement result of a test target using the proposed method is comparable to the result of conventional array scanning. Although the axial uncertainty is increased by a factor of approximately 2.5, the direct area scanning method is more than 300 times faster than the conventional array scanning mode of the same setup.