Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK

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Patent

Vorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes

1998 , Koerner, K. , Fritz, H. , Nyarsik, L. , Spur, G. , Uhlmann, E.

The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation.

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Patent

Verfahren und Anordnung zur Messung der Mikrogestalt technischer Oberflaechen

1989 , Koerner, K. , Fritz, H.

The invention relates to a process and an arrangement for the measurement of the microstructure of industrial surfaces according to the principle of the interference microscope. According to the invention, the virtual mirror planes existing in the object and reference beam chamber are projected by a different offset in optical conjugation; the location of the beam splitting and recombination are spatially separated and a correction is performed in such a way that the object and reference ray bundles propagate in a common beam chamber in parallel to each other. This makes it possible to eliminate any undesired circular interference structures which may occur during the interferometric measurement and makes a body reference surface superfluous.

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