Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK

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Grazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces

1993 , Spur, G. , Körner, K. , Nyarsik, L. , Fritz, H. , Uhlmann, E.

A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.

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Evaluation of interference patterns in a prism interferometer

1993 , Spur, G. , Nyarsik, L. , Körner, K. , Fritz, H.

Prism interferometers allow a ten times enlargement of the interference increment by means of grazing incidence of the objects's surface. Experiments were performed attempting to use a prism interferometer for measuring both the macro profile and the micro structure of technical surfaces. Because anamorphic elements are used in the prism interferometer, it was necessary to carry out a theoretical analysis of the system's imaging characteristics. An experimental method was suggested and experiments with a prototype system were performed.

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