Options
Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
Now showing
1 - 2 of 2
-
PatentVorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes( 1998)
;Koerner, K. ;Fritz, H. ;Nyarsik, L. ;Spur, G.Uhlmann, E.The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation. -
PublicationGrazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces( 1993)
;Spur, G. ;Körner, K. ;Nyarsik, L. ;Fritz, H.Uhlmann, E.A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.