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Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
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PublicationGrazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces( 1993)
;Spur, G. ;Körner, K. ;Nyarsik, L. ;Fritz, H.Uhlmann, E.A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed. -
PublicationEvaluation of interference patterns in a prism interferometer( 1993)
;Spur, G. ;Nyarsik, L. ;Körner, K.Fritz, H.Prism interferometers allow a ten times enlargement of the interference increment by means of grazing incidence of the objects's surface. Experiments were performed attempting to use a prism interferometer for measuring both the macro profile and the micro structure of technical surfaces. Because anamorphic elements are used in the prism interferometer, it was necessary to carry out a theoretical analysis of the system's imaging characteristics. An experimental method was suggested and experiments with a prototype system were performed.