Fraunhofer-Institut für Photonische Mikrosysteme IPMS

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Inverse confocal sensor based on a bidirectional OLED display

2011 , Grossmann, C. , Perske, F. , Zwick, S. , Riehemann, S. , Herold, R. , Richter, B. , Vogel, U. , Notni, G. , Tünnermann, A.

Bidirectional OLED-based microdisplays offer interesting possibilities for new applications. Light emission and detection is combined on one single chip by using OLED on CMOS technology. Such a chip has primarily been developed for optocouplers or photo-electric barriers, but it offers interesting possibilities for other fields. A new optical concept of an inverse confocal sensor based on bidirectional OLED Display will be presented.

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HYPOLED - VGA OLED micro-display for HMD and micro-projection

2009 , Vogel, U. , Underwood, I. , Notni, G. , Zilstorff, C. , Meerholz, K. , Haas, G.

HYPOLED is a collaborative European project that commenced in 2008. It is targeted toward "High-Performance OLED-Microdisplays for Mobile Multimedia HMD and Projection Applications". In this paper, we describe the initial objectives and present draft specifications for devices, the personal display system and micro-projection unit. Initial results are shown and discussed.

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Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

2006 , Sandner, T. , Schmidt, J.U. , Schenk, H. , Lakner, H. , Yang, M. , Gatto, A. , Kaiser, N. , Braun, S. , Foltyn, T. , Leson, A.

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Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications

2005 , Sandner, T. , Schmidt, J.U. , Schenk, H. , Lakner, H. , Braun, S. , Foltyn, T. , Leson, A. , Gatto, A. , Yang, M. , Kaiser, N.

This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) for applications in the NIR-spectral region to enable new applications like laser marking and material treatment at high optical power density. In the case of MSM with an unprotected Al coating, the absorption limits the maximal power density because of induced heating. The damage threshold for unprotected Al coatings was investigated. In addition highly reflective enhanced metallic and dielectric multilayer coatings for the NIR have been developed and characterized. These coatings resolve the problems of unprotected aluminum coatings related to NIR absorption and the resulting limitation of applicable laser power density. The coatings ensure a high reflectance even in corrosive environments. Enhanced metallic broadband reflectors reach a reflevctivity of 98.7% at 1064nm whereas narrow-band dielectric multilayer coatings reach a reflectivity of 99.7% at 1064 nm.

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P-176: HYPOLED - high-performance OLED microdisplays for mobile multimedia HMD and projection applications

2010 , Scholles, M. , Vogel, U. , Underwood, I. , Notni, G. , Zilstorff, C. , Meerholz, K. , Haas, G.

The HYPOLED project, partly funded by the European Commission, started in 2008. Its goal is to develop OLED Microdisplays for Mobile Multimedia HMD and Projection Applications. This contribution describes the objectives and present specifications for devices, the personal display and microprojection unit as well as intermediate results.

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Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors

2008 , Scholles, M. , Bräuer, A. , Frommhagen, K. , Gerwig, C. , Lakner, H. , Schenk, H. , Schwarzenberg, M.

Recently, there has been substantial progress in the development of ultracompact image projection systems. This has been enabled by the availability of electrically modulated laser sources for all three elementary colors and a 2D resonant microscanning mirror as a micro-opto-electro-mechanical system (MOEMS) device for light deflection. The laser beam formed by collimator optics is directed onto the micro-scanning mirror. Given the movement of the mirror, the laser beam scans the entire image area. By driving the mirror and electrically modulating the intensity of the laser beam in a synchronous manner, a projection of images can be achieved. In this contribution, we present the theoretical background of the projection system as well as the latest achievements in system design. Both monochrome and full-color systems are currently available. The latter uses a separate laser bank as an RGB light source, which is coupled with a projection head. For monochrome red systems, the laser diode can be integrated into the projection head as well, whose volume can be reduced to 15×7×5 mm. All systems have video graphics array (VGA) (640×480 pixels) resolution and operate with 8-bit color depth per pixel and 50 frames per second.

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Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images

2006 , Scholles, M. , Bräuer, A. , Frommhagen, K. , Gerwig, C. , Höfer, B. , Lakner, H. , Schenk, H. , Schreiber, P. , Schwarzenberg, M.

Projection systems comprising micromechanical scanning mirrors are a promising approach for information display of any kind. If combined with advanced laser diodes as light sources, ultra-compact projection heads can be realized, as it will be shown in this contribution. Besides the laser, key component of the system is a special MEMS device, a two-dimensional resonant micro scanning mirror. The laser beam formed by collimator optics is directed onto the micro scanning mirror. Then, the reflected beam describes a highly complicated Lissajous figure on the projection screen with flare angles of up to 20 degrees. By driving the mirror and electrically modulating the intensity of the laser beam in a synchronous manner, projection of images can be achieved. Advanced techniques that guarantee improved image quality and allow compensation of artifacts because of relative movement between projection head, screen, and human observer will be described. Based on these principles, several optoelectronic systems have been designed. A monochrome projection head that incorporates the laser diode, optics and the micro minor could be reduced to a volume of 15mm × 7 mm × 5mm. A slightly larger head is attached to a laser unit with red, green, and blue lasers via glass optical fiber for projection of full color images and video streams. All systems have VGA (640 × 480 pixels) resolution. They operate with 8 bit color depth per pixel and 50 frames per second. These key features in combination with the miniaturized size allow their use for a broad range of applications.

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P-176: HYPOLED - High-performance OLED microdisplays for mobile multimedia HMD and projection applications

2010 , Scholles, M. , Vogel, U. , Underwood, I. , Notni, G. , Zilstorff, C. , Meerholz, K. , Haas, G.

The HYPOLED project, partly funded by the European Commission, started in 2008. Its goal is to develop OLED Microdisplays for Mobile Multimedia HMD and Projection Applications. This contribution describes the objectives and present specifications for devices, the personal display and micro-projection unit as well as intermediate results.

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Publication

MEMS compatible illumination and imaging micro-optical systems

2007 , Bräuer, A. , Dannberg, P. , Duparre, J. , Höfer, B. , Schreiber, P. , Scholles, M.

The development of new MOEMS demands for cooperation between researchers in micromechanics, optoelectronics and microoptics at a very early state. Additionally, microoptical technologies being compatible with structured silicon have to be developed. The microoptical technologies used for two silicon based microsystems are described in the paper. First, a very small scanning laser projector with a volume of less than 2 cm3, which operates with a directly modulated lasers collimated with a microlens, is shown. The laser radiation illuminates a 2D-MEMS scanning mirror. The optical design is optimized for high resolution (VGA). Thermomechanical stability is realized by design and using a structured ceramics motherboard. Secondly, an ultrathin CMOS-camera having an insect inspired imaging system has been realized. It is the first experimental realization of an artificial compound eye. Micro-optical design principles and technology is used. The overall thickness of the imaging system is only 320 µm, the diagonal field of view is 21°, and the f-number is 2.6. The monolithic device consists of an UV-replicated microlens array upon a thin silica substrate with a pinhole array in a metal layer on the back side. The pitch of the pinholes differs from that of the lens array to provide individual viewing angle for each channel. The imaging chip is directly glued to a CMOS sensor with adapted pitch. The whole camera is less than 1mm thick. New packaging methods for these systems are under development.

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DUV-reflective coatings and novel actuator materials for light modulator arrays

2006 , Schmidt, Jan-Uwe , Friedrichs, Martin , Sandner, Thilo , Heber, Jörg , Rudloff, Dirk , Lakner, Hubert , Yang, M. , Gatto, A. , Kaiser, Norbert

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