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Design of a 2D MEMS micromirror with indirect static actuation

: Kaupmann, P.; Pinter, S.; Franz, J.; Streiter, R.; Otto, T.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2017. Conference Proceedings : October 29 - November 1, 2017, Glasgow, Scotland, UK
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5090-1012-7
ISBN: 978-1-5090-1013-4
ISBN: 978-1-5386-4056-2
Sensors Conference <2017, Glasgow>
Fraunhofer ENAS ()

We present the design of a 2D MEMS micromirror with indirect static actuation based on gyroscopic effects. Additionally to the primary resonant oscillation we introduce a second one, disturbing the angular momentum of the former. This under special conditions leads to a directed torque about a third axis. This concept thus uses only resonant actuation by still enabling static deflection, potentially being more energy efficient compared to current technologies. After discussion of the used manufacturing process, the MEMS design workflow and the resulting fully functional micromirror design is shown. In first experimental results we then show a proof of concept for the manufactured micromirror devices.