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  4. Contactless resistivity mapping of semi-insulating substrates.
 
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1993
Journal Article
Title

Contactless resistivity mapping of semi-insulating substrates.

Other Title
Kontaktfreie Widerstandstopographie semi-isolierender Substrate
Abstract
High substrate resistivity is an important competitive asset of Ill-V semiconductors. It enhances the performance of ultrafast microelectronic and optoelectronic circuits. For a thorough on-line wafer quality control, a superior measurement system is required to evaluate resistivity fast, nondestructively and with high lateral resolution.
Author(s)
Jantz, W.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Stibal, R.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Journal
III-Vs Review  
DOI
10.1016/0961-1290(93)90178-Q
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • GaAs

  • InP

  • resistivity

  • spezifischer Widerstand

  • Topographie

  • topography

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