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Clean Equipment Design of Manufacturing Devices and Components

Reinraumgerechte Konstruktion von Fertigungsgeräten und -komponenten
: Degenhart, E.; Geißinger, J.

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
Ultra Clean Technology. STEP Europe Conference
London; Mountain View, 1990
Step Europe Conference <1990, Brüssel>
Conference Paper
Fraunhofer IPA ()
Clean materials; cleanroom; Design rules; Fertigung; Handhaben; Handhabungskomponente; Handling components; Konstruktion; Konstruktionsrichtlinien; Kontamination; particle measurement; Partikelmeßtechnik; Reinraum; Reinraumtechnik; Teilchen

The aim of a cleanroom suitable design is to minimize particulate emission mainly in the area of the manufacturing system where the products must be handled without protection. The designing measures consist of the layout of the device on the one hand and the application of functional components with minimal emission of particles on the other hand. The most important aspect concerning the design of the device is flow guidance. The results presented in the following were obtained from particle measurements, particle analyses, and flow investigations at a representative range of functional components, as e.g. power units, guidances, drive systems, and manufacturing devices. For these investigations a generally applicable measuring procedure was developed which allows the individual results to be compared.