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Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenes
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1985
Journal Article
Title
Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenes
Author(s)
Sah, R.E.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Bubenzer, A.
Dischler, B.
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Journal
Applied Physics Letters
DOI
10.1063/1.95493
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Keyword(s)
Dünnschicht
fluorierter Kohlenwasserstoff
Plasmaverfahren
