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Scanning CO2 laser interferometer for the inspection of infrared transmitting plane parallel plates.

Abtastendes CO2 Laser Interferometer zur Untersuchung von Infrarot durchlässigen plan-parallelen Scheiben
: Dischler, B.; Koidl, P.

Arnold, J.B.; Parks, R.E. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in Fabrication and Metrology for Optics and Large Optics
Bellingham/Wash.: SPIE, 1988 (Proceedings of SPIE 966)
ISBN: 0-8194-0001-7
pp.177-182 : Abb.,Tab.,Lit.
International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering <32, 1988, San Diego/Calif.>
Conference Paper
Fraunhofer IAF ()
germanium; Homogenität; Infrarot; interferometer; laser

A scanning CO2 laser interferometer is described, in which the test sample itself forms the interference cavity. Results for plane parallel plates of germanium and of galliumarsenide are presented and discussed. Samples with perfectly plane surfaces allow to evaluate the uniformity of the refractive index across the sample.