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  4. Scanning CO2 laser interferometer for the inspection of infrared transmitting plane parallel plates.
 
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1988
Conference Paper
Title

Scanning CO2 laser interferometer for the inspection of infrared transmitting plane parallel plates.

Other Title
Abtastendes CO2 Laser Interferometer zur Untersuchung von Infrarot durchlässigen plan-parallelen Scheiben
Abstract
A scanning CO2 laser interferometer is described, in which the test sample itself forms the interference cavity. Results for plane parallel plates of germanium and of galliumarsenide are presented and discussed. Samples with perfectly plane surfaces allow to evaluate the uniformity of the refractive index across the sample.
Author(s)
Dischler, B.
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Mainwork
Advances in Fabrication and Metrology for Optics and Large Optics  
Conference
International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering 1988  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • germanium

  • Homogenität

  • Infrarot

  • interferometer

  • laser

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