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248 nm laser interaction studies on LaF3/MgF2 optical coatings by mass spectroscopy and x-ray photoelectron spectroscopy

: Kaiser, N.; Bodemann, A.; Raupach, L.; Weißbrodt, P.; Hacker, E.

	Bennett, H.E.: Laser-induced damage in optical materials 1995. Proceedings Bellingham, Wash.: SPIE, 1996 (SPIE Proceedings Series 2714) ISBN: 0-8194-2089-1 pp.405 ff
	Symposium on Optical Materials for High-Power Lasers <27, 1995, Boulder/Colo.>

	English
	Conference Paper
	Fraunhofer IOF ()
	Dünne optische Schicht; excimer laser optics; Excimer-Laser-Optik; fluoride thin films; Fluoridschicht; laser induced damage threshold; Laserzerstörschwelle; optical coating; optical thin films; oxide thin films; Oxidschicht; ultraviolet spectral region; ultravioletter Spektralbereich; UV

Abstract
A UHV surface analysis system combined with an optical setup was used in the present work to study the conditioning mechanism on MgF2/LaF3HR coatings at 248 nm excimer laser wavelength. During laser irradiation of the sample the laser-induced emission of contaminants and coating material from the sample surface was recorded by a quadrupole mass spectrometer. To analyze changes in composition and chemical bonds of the coating surface XPS-measurements were performed before, during and after irradiation in dependence on sample design, number of pulses and oxygen atmosphere.

: http://publica.fraunhofer.de/documents/PX-2933.html