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MODFET technology optimization for MMICs using statistical microwave characterization

MODFET-Technologie-Optimierung für MMICs mit statistischer Mikrowellen-Charakterisierung

: Braunstein, J.; Tasker, P.J.; Hülsmann, A.; Köhler, K.; Kaufel, G.; Schlechtweg, M.

DOI: 10.1109/EUMA.1993.336803

	23rd European Microwave Conference '93. Proceedings 1993 pp.107-109 : Abb.,Tab.,Lit.
	European Microwave Conference (EuMC) <23, 1993, Madrid>

	English
	Conference Paper
	Fraunhofer IAF ()
	microwave measurement; Mikrowellen-Messung; MMIC; MODFET; Technologieoptimierung; technology optimization

Abstract
77 GHz LNAs and TWAs operating from DC to 80 GHz were fabricated successfully (1),(2) using a highly reproducible MODFET technology with mushroom gates of 0.16 mym length. Technology development and optimization were carried out using DC and RF wafer mapping. A high yield high performance transistor process required for 70 to 80 GHz applications was therefore established.

: http://publica.fraunhofer.de/documents/PX-24750.html