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1993
Conference Paper
Title
MODFET technology optimization for MMICs using statistical microwave characterization
Other Title
MODFET-Technologie-Optimierung für MMICs mit statistischer Mikrowellen-Charakterisierung
Abstract
77 GHz LNAs and TWAs operating from DC to 80 GHz were fabricated successfully (1),(2) using a highly reproducible MODFET technology with mushroom gates of 0.16 mym length. Technology development and optimization were carried out using DC and RF wafer mapping. A high yield high performance transistor process required for 70 to 80 GHz applications was therefore established.
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