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Investigations of relaxation effects in Cu-lines on Si-substrates
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1997
Conference Paper
Title
Investigations of relaxation effects in Cu-lines on Si-substrates
Author(s)
Köhler, B.
Meissner, O.
Melov, V.G.
Schreiber, J.
Mainwork
Micro Materials. Micro Mat '97. Proceedings
Conference
Micro Materials (Micro Mat) 1997
Language
English
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP