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  4. Investigations of relaxation effects in Cu-lines on Si-substrates
 
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1997
Conference Paper
Title

Investigations of relaxation effects in Cu-lines on Si-substrates

Author(s)
Köhler, B.
Meissner, O.
Melov, V.G.
Schreiber, J.
Mainwork
Micro Materials. Micro Mat '97. Proceedings  
Conference
Micro Materials (Micro Mat) 1997  
Language
English
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP  
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