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Investigation of inhomogenities and impurities in fluoride coatings for high power excimer lasers


Guenther, K.H.:
Thin films for optical systems : Tagung 14-18 September 1992, Berlin
Bellingham, Wash.: SPIE, 1993 (Europto series)
ISBN: 0-8194-0961-8
Conference Thin Films for Optical Systems <1992, Berlin>
Conference Paper
Fraunhofer IOF ()
Dünne optische Schicht; excimer laser optics; Excimer-Laser-Optik; fluoride thin films; Fluoridschicht; laser induced damage threshold; Laserzerstörschwelle; optical coating; optical thin films; oxide thin films; Oxidschicht; ultraviolet spectral region; ultravioletter Spektralbereich; UV

In the thickness range 50nm-500nm at substrate temperatures of 300K, 375K, and 575K the structure of physical-vapour-deposited magnesium, lanthanum, calcium, and lithium fluoride films were investigated using TEM microfractographical replication technique. Two growth groups, columnar and granular growth, were found and main structure buildings elements with its characteristical medium size have been determined. Using SIMS, SNMS, RBS, and partially spectroscopical and gravimetrical measurements, the O and C contamination of the films has been investigated. The quantitative results were related to the characteristical structure building elements.