• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Evaluation of mechanical properties of porous OSG films by PFQNM AFM and benchmarking with traditional instrumentation
 
  • Details
  • Full
Options
2020
Journal Article
Title

Evaluation of mechanical properties of porous OSG films by PFQNM AFM and benchmarking with traditional instrumentation

Abstract
Characterization of mechanical properties of thin porous films with nanoscale resolution remains a challenge for instrumentation science. In this work, atomic force microscopy (AFM) in the PeakForce quantitative nanomechanical mapping (PFQNM) mode is used for Young's modulus measurements of porous organosilicate glass films. The test samples were prepared by sol-gel techniques using silicon alkoxide and methyl-modified silicon alkoxide to prepare films with different CH3/Si ratios. The film porosity was engineered by using a Brij 30 template and the evaporation-induced self-assembly technique. The chemical composition, pore structure, and modification during air storage and thermal annealing were studied using FTIR spectroscopy and ellipsometric porosimetry (EP). Since PFQNM AFM was first used for evaluation of Young's modulus of thin porous films, the obtained results are benchmarked using nanoindentation (NI), surface acoustic wave (SAW) spectroscopy, and EP. The results have good agreement with each other, but PFQNM and NI give slightly larger values than SAW and EP. The difference is in agreement with previously reported data and reflects the different physical meaning of the obtained values. It is shown that the presence of physically adsorbed water strongly influences the results generated by PFQNM AFM, and therefore, reliable water removal from the studied materials is necessary.
Author(s)
Ovchinnikov, I.S.
RTU MIREA
Vishnevskiy, A.S.
RTU MIREA
Seregin, D.S.
RTU MIREA
Rezvanov, A.A.
MIPT / MERI
Schneider, Dieter
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Sigov, A.S.
RTU MIREA
Vorotilov, K.A.
RTU MIREA
Baklanov, R.A.
RTU MIREA / North China University of Technology
Journal
Langmuir. The ACS journal of surfaces and colloids  
Funder
Ministry of Science and Higher Education of Russia
DOI
10.1021/acs.langmuir.0c01054
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • acoustic spectroscopy

  • sol-gel

  • pore structure

  • Fourier transform infrared spectroscopy

  • elastic moduli

  • digital storage

  • chemical modification

  • atomic force microscopy

  • surface acoustic waves

  • acoustic surface wave devices

  • LAwave

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024