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  4. Fast cross-linking-characterization of waveguide-polymers on wafers by imaging low-coherence interferometry
 
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2018
Journal Article
Title

Fast cross-linking-characterization of waveguide-polymers on wafers by imaging low-coherence interferometry

Abstract
This work introduces a novel method to characterize cross-linking differences in spincast polymers for waveguide applications. The method is based on a low-coherence interferometer which utilizes an imaging spectrometer to gather spatially resolved data along a line without the need for scanning. The cross-linking characterization is performed by the determination of the wavelength-dependent optical thickness. In order to do this, an algorithm to analyze the wrapped phase data and extract refractive index information is developed. Finally, the approach is tested on photo-lithographically produced samples with lateral refractive index differences in pitches of 50 mm.
Author(s)
Taudt, Christopher  orcid-logo
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Nelsen, Bryan
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Schlögl, Sandra
Polymer Competence Center Leoben GmbH
Koch, Edmund
TU Dresden
Hartmann, Peter  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Journal
Proceedings. MDPI AG  
Conference
Eurosensors Conference 2018  
Open Access
DOI
10.3390/proceedings2131046
Additional full text version
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Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • interferometry

  • cross-linking characterization

  • white-light interferometry

  • dispersion enhanced low-coherence interferometry

  • photoresist

  • semiconductor manufacturing

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