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2018
Book Article
Title

Vacuum arc with particle filtering

Abstract
Driving the cathode spots over the target surface by strong external or intrinsic magnetic fields allows to reduce, but not to suppress the emission of target splinters.
Author(s)
Schultrich, Bernd  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Mainwork
Tetrahedrally Bonded Amorphous Carbon Films I  
DOI
10.1007/978-3-662-55927-7_11
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
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