Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Vacuum arc with particle filtering
| Schultrich, Bernd:
Tetrahedrally Bonded Amorphous Carbon Films I : Basics, Structure and Preparation
Berlin: Springer, 2018 (Springer series in materials science 263)
ISBN: 978-3-662-55925-3 (Print)
ISBN: 978-3-662-55927-7 (Online)
DOI: 10.1007/978-3-662-55927-7
pp.493-526 |
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| English |
| Book Article |
| Fraunhofer IWS () |
Abstract
Driving the cathode spots over the target surface by strong external or intrinsic magnetic fields allows to reduce, but not to suppress the emission of target splinters.