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Post etch wet clean processes for advanced technology nodes
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2014
Conference Paper
Title
Post etch wet clean processes for advanced technology nodes
Author(s)
Uhlig, Benjamin
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Steinke, Philipp
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Liske, Romy
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Ott, Andreas
Mieth, Oliver
Mainwork
MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM
Conference
Workshop on "Materials for Advanced Metallization" (MAM) 2014
Workshop Devoted to Materials Research, Materials Properties and Interactions 2014
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
