Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Qualification of Materials, Components and Systems - Qualification of Fluidhandling Objects

Qualifizierung von Materialien, Komponenten und Systemen - Qualifizierung von Objekten zur Anwendung von Fluiden
: Ernst, C.; Werner, D.

Dorner, J. ; Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
Quo Vadis Media : 1st Technical Conference Ultra-Pure Media, November 2-3, 1999, Dresden, Germany. Joint Media - An European Initiative in the Field of Ultra-Pure Media for the Manufacture of Semiconductors
Stuttgart, 1999
Technical Conference Ultra-Pure Media <1, 1999, Dresden>
Conference Paper
Fraunhofer IPA ()
High Purity Media; Reinheitsspezifikation; Reinheitsklasse; Versorgungslogistik; Media Supply System; Spurenverunreinigung; SEMI; SEMATECH; Chemikalie; Richtlinie; standard; gas; Teilchen

IC-Manufacturing requires high quality fluids with lowest levels of particles and trace impurities. Suppliers of fluidhandling components and systems are obliged to prove the evidence of the products' suitability. The definition and usage of classification models is not practicable. Standardized specifications as a reference and in some cases even the test guidelines are missing.