Title

Optical/laser microlithography VIII

Title Supplement

22-24 February 1995, Santa Clara, California

Person Involved

Corporate Author

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1995

Series

Proceedings of SPIE; 2440

ISBN

0-8194-1788-2

Conference