Title

Microelectronic manufacturing yield, reliability, and failure analysis III

Title Supplement

1 - 2 October 1997, Austin, Texas

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1997

Series

Proceedings of SPIE; 3216

ISBN

0-8194-2648-2

Conference