Title

Alternative Lithographic Technologies IV

Title Supplement

12.-16.2.2012, San Jose, CA, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2012

Series

Proceedings of SPIE; 8323

ISBN

978-0-8194-8979-1

Conference