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Title
Semiconductor wafer bonding 9: Science, technology, and applications
Title Supplement
Ninth International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications, held in Cancun, Mexico, as part of the 2006 fall meeting of the Electrochemical Society
Person Involved
Corporate Author
Electrochemical Society -ECS-
Electrochemical Society -ECS-, Electronics and Photonics Division
Publisher
Publishing Place
Pennington, NJ
Publication Date
2006
Series
ECS transactions; 3, 6
ISSN
1938-5862
ISBN
1-566-77506-X
DDC
660