Title

Frontiers of characterization and metrology for nanoelectronics

Title Supplement

International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, Maryland, 27 - 29 March 2007

Person Involved

Corporate Author

American Institute of Physics -AIP-, New York

Publisher

Publishing Place

Melville, NY

Publication Date

2007

Series

AIP Conference Proceedings; 931

ISBN

978-0-7354-0441-0

Conference