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Frontiers of characterization and metrology for nanoelectronics
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Title
Frontiers of characterization and metrology for nanoelectronics
Titel Supplements
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, Maryland, 27 - 29 March 2007
Institut
American Institute of Physics -AIP-, New York
Verlag
AIP
Verlagsort
Melville, NY
Datum
2007
Serie
AIP Conference Proceedings
Konferenz
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2007