Title

Modeling aspects in optical metrology III

Title Supplement

23 - 24 May 2011, Munich, Germany; Part of the SPIE Optical Metrology Symposium

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2011

Series

Proceedings of SPIE; 8083

ISBN

978-0-8194-8679-0

Conference