Title

Laser applications in microelectronic and optoelectronic manufacturing VI

Title Supplement

22 - 24 January 2001, San Jose, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4274

ISBN

0-8194-3952-5

Conference