Title

European Materials Research Society 2002 Spring Meeting, Symposium O: The 300 mm Silicon Era: Material, Equipment, Technology. Papers

Title Supplement

18 - 21 June, 2002, Strasbourg, France

Person Involved

Corporate Author

European Materials Research Society -EMRS-

Publisher

Publishing Place

Oxford

Publication Date

2002

Series

Materials science in semiconductor processing; 5.2002,Nr.4/5

Conference